✦ LIBER ✦
Correlation between two time-dependent dielectric breakdown measurements for the gate oxides damaged by plasma processing
✍ Scribed by Eriguchi, K.; Kosaka, Y.
- Book ID
- 114537169
- Publisher
- IEEE
- Year
- 1998
- Tongue
- English
- Weight
- 158 KB
- Volume
- 45
- Category
- Article
- ISSN
- 0018-9383
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