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Correlation between the density of TiO2 films and their properties

โœ Scribed by C.R Ottermann; K Bange

Book ID
108388915
Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
258 KB
Volume
286
Category
Article
ISSN
0040-6090

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๐Ÿ“œ SIMILAR VOLUMES

Correlation between microstructure contr
Correlation between microstructure control, density and diffusion barrier properties of TiN(O) films
โœ A. Alberti; S. Molinaro; F. La Via; C. Bongiorno; G. Ceriola; S. Ravesi ๐Ÿ“‚ Article ๐Ÿ“… 2002 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 344 KB

TiN layers have been used as diffusion barriers to prevent intermixing of aluminium and silicon. During TiN deposition on Ti by reactive sputtering, oxygen has been introduced in-situ into the barrier. Depending on the oxygen flow, a different content of oxygen has been incorporated into the TiN lay