Correlation between temperature and impurity concentration fluctuations in silicon crystals grown by the Czochralski method

✍ Scribed by Koichi Kakimoto; Toshiyuki Shyo; Minoru Eguchi

• Publisher: Elsevier Science
• Year: 1995
• Tongue: English
• Weight: 383 KB
• Volume: 151
• Category: Article
• ISSN: 0022-0248
• DOI: 10.1016/0022-0248(95)00033-x