Correlation between spectroscopic reflectrometry and electrical measurements of SIMOX SOI film thickness

✍ Scribed by P. Smeys; U. Magnusson; J.P. Colinge

• Publisher: Elsevier Science
• Year: 1992
• Tongue: English
• Weight: 232 KB
• Volume: 19
• Category: Article
• ISSN: 0167-9317
• DOI: 10.1016/0167-9317(92)90553-4