Correlation between etch pits formed by molten KOH+Na2O2 etching and dislocation types in heavily doped n+-4H–SiC studied by X-ray topography

✍ Scribed by Yao, Yongzhao; Ishikawa, Yukari; Sugawara, Yoshihiro; Sato, Koji; Danno, Katsunori; Suzuki, Hiroshi; Bessho, Takeshi; Yamaguchi, Satoshi; Nishikawa, Koichi

• Book ID: 122714319
• Publisher: Elsevier Science
• Year: 2013
• Tongue: English
• Weight: 795 KB
• Volume: 364
• Category: Article
• ISSN: 0022-0248
• DOI: 10.1016/j.jcrysgro.2012.12.011