Correlation between Er-luminescent centers and defects in Si co-implanted with Er and O

✍ Scribed by K Nakashima; O Eryu; H Akiyama; Y Maeda; H Ebisu

• Book ID: 114164601
• Publisher: Elsevier Science
• Year: 2001
• Tongue: English
• Weight: 136 KB
• Volume: 175-177
• Category: Article
• ISSN: 0168-583X
• DOI: 10.1016/s0168-583x(00)00671-6