✦ LIBER ✦
Correlation between barrier integrity and TDDB performance of copper porous low-k interconnects
✍ Scribed by Zs. Tőkei; M. Patz; M. Schmidt; F. Iacopi; S. Demuynck; K. Maex
- Book ID
- 108207366
- Publisher
- Elsevier Science
- Year
- 2004
- Tongue
- English
- Weight
- 379 KB
- Volume
- 76
- Category
- Article
- ISSN
- 0167-9317
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