✦ LIBER ✦
Correlated use of characterization techniques to optimize the Mg implantation annealing for self-aligned HBT's
✍ Scribed by V. Amarger; C. Dubon-Chevallier; A.C. Papadopoulo; B. Descouts; Y. Gao
- Publisher
- Elsevier Science
- Year
- 1991
- Tongue
- English
- Weight
- 275 KB
- Volume
- 50
- Category
- Article
- ISSN
- 0169-4332
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