✦ LIBER ✦
Correction of nonlinear deflection distortion in a direct exposure electron-beam system : H. Engelke, J. F. Loughran, M. S. Michail and P. M. Ryan. IBM Jl Res. Dev. 21, (6) 506 (November 1977)
- Publisher
- Elsevier Science
- Year
- 1978
- Tongue
- English
- Weight
- 125 KB
- Volume
- 17
- Category
- Article
- ISSN
- 0026-2714
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