Improvement of oxide thickness determina
✍
L. Soliman; E. Duval; M. Benzohra; E. Lheurette; K. Ketata; M. Ketata
📂
Article
📅
2001
🏛
Elsevier Science
🌐
English
⚖ 111 KB
It is well known that capacitance-voltage (C2V) measurements provide a simple determination of oxide thickness, but with the scaling down of components the classical method is not appropriated any more. We have observed that for two devices with the same oxide thickness and different surfaces, the c