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Cooperative growth of nano-islands on Si(1 0 0) surface

โœ Scribed by T. Kawamura; M. Suzuki; S. Toyoshima


Book ID
108279519
Publisher
Elsevier Science
Year
2007
Tongue
English
Weight
356 KB
Volume
601
Category
Article
ISSN
0039-6028

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Effect of humidity on nano-oxidation of
โœ H. Kuramochi; K. Ando; H. Yokoyama ๐Ÿ“‚ Article ๐Ÿ“… 2003 ๐Ÿ› Elsevier Science ๐ŸŒ English โš– 219 KB

The effect of humidity on the nano-oxidation of p-Si(0 0 1) using an atomic force microscope is systematically studied at the relative humidity from 40% to 80%. Nanometer scale structures are fabricated at various relative humidities, applied voltages, exposure times and tip speeds. The size and sha