Cooperative effects between arsenic and boron in silicon during simultaneous diffusions from ion implanted and chemical source predepositions : R. B. Fair. Solid St. Electron.17, 17 (1974)

• Publisher: Elsevier Science
• Year: 1974
• Tongue: English
• Weight: 177 KB
• Volume: 13
• Category: Article
• ISSN: 0026-2714
• DOI: 10.1016/0026-2714(74)90550-2