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Cool production sputtering system reduces substrate heating

✍ Scribed by Sloan Technology Corp


Publisher
Elsevier Science
Year
1975
Tongue
English
Weight
103 KB
Volume
25
Category
Article
ISSN
0042-207X

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A new device of complete melt removal to produce the chilled air in cool-thermal discharge systems is operated with constant heat discharge flux from ice melting. Heat-transfer efficiency performance was considerably improved, compared with the device without melt removal, using the approximation so