✦ LIBER ✦
Conversion of tetraethoxysilane (TEOS) to silica film-forming precursors in atomic oxygen-induced chemical vapor deposition
✍ Scribed by Aleksander M. Wróbel; Agnieszka Walkiewicz-Pietrzykowska; Marek Stasiak; Dr. Józef Kulpiúski
- Publisher
- John Wiley and Sons
- Year
- 1996
- Tongue
- English
- Weight
- 762 KB
- Volume
- 2
- Category
- Article
- ISSN
- 0948-1907
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