Conversion Efficiency of Alkoxide Precursor to Oxide Films Grown by an Ultrasonic-Assisted, Pulsed Liquid Injection, Metalorganic Chemical Vapor Deposition (Pulsed-CVD) Process

✍ Scribed by Susan Krumdieck; Rishi Raj

• Book ID: 110827817
• Publisher: John Wiley and Sons
• Year: 2004
• Tongue: English
• Weight: 199 KB
• Volume: 82
• Category: Article
• ISSN: 0002-7820
• DOI: 10.1111/j.1151-2916.1999.tb01968.x