✦ LIBER ✦
Controlling plasma charge damage in advanced semiconductor manufacturing. Challenge of small feature size device, large chip size, and large wafer size
✍ Scribed by Aum, P.K.; Brandshaft, R.; Brandshaft, D.; Dao, T.B.
- Book ID
- 114537215
- Publisher
- IEEE
- Year
- 1998
- Tongue
- English
- Weight
- 723 KB
- Volume
- 45
- Category
- Article
- ISSN
- 0018-9383
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