Controlling boron diffusion during rapid thermal annealing with co-implantation by amphoteric impurity atoms

✍ Scribed by Makarevich, Yu. V.; Komarov, F. F.; Komarov, A. F.; Mironov, A. M.; Zayats, G. M.; Miskevich, S. A.

• Book ID: 115065024
• Publisher: Allerton Press Inc
• Year: 2012
• Tongue: English
• Weight: 269 KB
• Volume: 76
• Category: Article
• ISSN: 1062-8738
• DOI: 10.3103/s1062873812050164