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Controlled oxygen vacancy induced p-type conductivity in HfO2-x thin films

✍ Scribed by Hildebrandt, Erwin; Kurian, Jose; Muller, Mathis M.; Schroeder, Thomas; Kleebe, Hans-Joachim; Alff, Lambert

Book ID: 115444954
Publisher: American Institute of Physics
Year: 2011
Tongue: English
Weight: 966 KB
Volume: 99
Category: Article
ISSN: 0003-6951
DOI: 10.1063/1.3637603

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