✦ LIBER ✦
Controlled oxidation of tantalum and aluminium in a radio-frequency-excited glow discharge : P. L. Worledge and D. White, Br. J. Appl. Phys.18 (1967), p. 1337
- Book ID
- 103268935
- Publisher
- Elsevier Science
- Year
- 1968
- Tongue
- English
- Weight
- 99 KB
- Volume
- 7
- Category
- Article
- ISSN
- 0026-2714
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