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Controlled growth of ZnO array on FTO glass substrate by electrodeposition

✍ Scribed by Lijuan Luo; Gang Lü; Bihui Li; Zhenghua Chen; Yiwen Tang

Publisher
Wuhan University
Year
2010
Tongue
English
Weight
702 KB
Volume
15
Category
Article
ISSN
1007-1202

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## Abstract Polycrystalline undoped ZnO thin films were deposited on glass substrates by atomic layer deposition (ALD). Effects of surface pretreatments prior to the ALD growth have been investigated. In the relationship between grown film thickness and number of ALD cycles, an incubation period in