Modeling of chemical vapor deposition of
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B. Ruf; F. Behrendt; O. Deutschmann; S. Kleditzsch; J. Warnatz
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Article
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2000
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Elsevier Science
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English
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The production of artificial diamond and diamond layers is not only of scientific but also of commercial importance. Techniques allowing for high growth rates of large and homogeneous diamond films are of special interest. Chemical vapor deposition of diamond layers using rich acetylene-oxygen flame