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Controlled crystallization of LPCVD amorphous silicon

✍ Scribed by Harland G. Tompkins; Ken Seddon; Lisa K. Garling; Peter Fejes

Publisher: Elsevier Science
Year: 1996
Tongue: English
Weight: 601 KB
Volume: 272
Category: Article
ISSN: 0040-6090
DOI: 10.1016/0040-6090(95)06979-8

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