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Control of wet-etching thickness in the vertical cavity surface emitting laser structure by in situ laser reflectometry

โœ Scribed by Cho, H. K.; Lee, J. Y.; Lee, B.; Baek, J. H.; Han, W. S.


Book ID
121697094
Publisher
AVS (American Vacuum Society)
Year
1999
Tongue
English
Weight
427 KB
Volume
17
Category
Article
ISSN
0734-211X

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