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Control of the Microdomain Orientation in Block Copolymer Thin Films with Homopolymers for Lithographic Application

✍ Scribed by Kitano, Hirofumi; Akasaka, Satoshi; Inoue, Tomohiro; Chen, Feng; Takenaka, Mikihito; Hasegawa, Hirokazu; Yoshida, Hiroshi; Nagano, Hideki

Book ID: 127032251
Publisher: American Chemical Society
Year: 2007
Tongue: English
Weight: 787 KB
Volume: 23
Category: Article
ISSN: 0743-7463
DOI: 10.1021/la0637014

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