✦ LIBER ✦
Control of slip in horizontal silicon epitaxy with profiled susceptors
✍ Scribed by A.H. Goemans; L.J. van Ruyven
- Publisher
- Elsevier Science
- Year
- 1975
- Tongue
- English
- Weight
- 289 KB
- Volume
- 31
- Category
- Article
- ISSN
- 0022-0248
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