Control of plasma parameters in a cylinder symmetrical capacitively coupled rf ion source by use of a magnetic field

✍ Scribed by D. Korzec; J. Engemann; R. Wolters

• Publisher: Elsevier Science
• Year: 1989
• Tongue: English
• Weight: 577 KB
• Volume: 39
• Category: Article
• ISSN: 0042-207X
• DOI: 10.1016/0042-207x(89)91118-4