Characterization and control of phosphin
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V.M. Fthenakis; P.D. Moskowitz
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Article
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1987
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Elsevier Science
β 837 KB
Phosphine (PH3) is a highly toxic and flammable gas used in photovoltaic cell manufacturing. Its use can present serious occupational and public health hazards if appropriate prevention and control options are not effectively implemented. This report reviews technologies for controlling PH3 emission