✦ LIBER ✦
Control of oxygen concentration in heavily antimony-doped Czochralski Si crystals by ambient argon pressure
✍ Scribed by Koji Izunome; Xinming Huang; Shiniji Togawa; Kazutaka Terashima; Shigeyuki Kimura
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 276 KB
- Volume
- 151
- Category
- Article
- ISSN
- 0022-0248
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