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Control of nanopositioning and nanomeasuring machines with a modular FPGA based data processing system

✍ Scribed by Zschäck, Stephan; Klöckner, Johannes; Gushchina, Irina; Amthor, Arvid; Ament, Christoph; Fengler, Wolfgang


Book ID
121185136
Publisher
Elsevier Science
Year
2013
Tongue
English
Weight
823 KB
Volume
23
Category
Article
ISSN
0957-4158

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