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Control of ion-energy distribution in a back-diffusion type plasma

✍ Scribed by Y. Kawai; H. Ikegami

Publisher: Elsevier Science
Year: 1970
Tongue: English
Weight: 141 KB
Volume: 32
Category: Article
ISSN: 0375-9601
DOI: 10.1016/0375-9601(70)90524-4

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