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Control of III–V epitaxy in a metalorganic chemical vapor deposition process: impact of source flow control on composition and thickness

✍ Scribed by Monique S. Gaffney; Casper M. Reaves; Roy S. Smith; Archie L. Holmes Jr.; Steven P. DenBaars


Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
608 KB
Volume
167
Category
Article
ISSN
0022-0248

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