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Control of discharge conditions to reduce hydrogen content in boron films coating

✍ Scribed by M Natsir; A Sagara; K Tsuzuki; B Tsuchiya; Y Hasegawa; O Motojima


Publisher
Elsevier Science
Year
1996
Tongue
English
Weight
408 KB
Volume
47
Category
Article
ISSN
0042-207X

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