✦ LIBER ✦
Control of defects in C+, Ge+, and Er+ implanted Si using post amorphization and solid phase regrowth
✍ Scribed by F. Cristiano; J.P. Zhang; R.J. Wilson; W.P. Gillin; P.L.F. Hemment
- Book ID
- 113284926
- Publisher
- Elsevier Science
- Year
- 1995
- Tongue
- English
- Weight
- 953 KB
- Volume
- 96
- Category
- Article
- ISSN
- 0168-583X
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