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Control factors and by-products during decomposition of butane in electron beam irradiation

โœ Scribed by Youn-Suk Son; Kang-Nam Park; Jo-Chun Kim


Book ID
108257057
Publisher
Elsevier Science
Year
2010
Tongue
English
Weight
220 KB
Volume
79
Category
Article
ISSN
0969-806X

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๐Ÿ“œ SIMILAR VOLUMES


Damage and recovery by electron and ion
โœ H. Bender; W. D. Chen ๐Ÿ“‚ Article ๐Ÿ“… 1990 ๐Ÿ› John Wiley and Sons ๐ŸŒ English โš– 877 KB

## Abstract Damage and recovery induced by electron and ion beam irradiation during AES analysis of silicon nitride and oxynitrides are discussed. The results show that after prolonged electron beam irradiation, a damage peak is induced in the Si LVV spectrum. The initial incubation time decreases