<p><P>Interest in the control and optimization of multiscale process systems has been triggered by the need to achieve tight feedback control and optimal operation of complex processes, such as deposition and sputtering of thin films in semiconductor manufacturing, which are characterized by highly
Control and Optimization of Multiscale Process Systems
β Scribed by Panagiotis D. Christofides, Antonios Armaou, Yiming Lou, Amit Varshney (auth.)
- Publisher
- BirkhΓ€user Basel
- Year
- 2009
- Tongue
- English
- Leaves
- 246
- Series
- Control engineering
- Edition
- 1
- Category
- Library
No coin nor oath required. For personal study only.
β¦ Subjects
Control , Robotics, Mechatronics; Systems Theory, Control; Optimization; Industrial and Production Engineering; Mathematical Modeling and Industrial Mathematics; Industrial Chemistry/Chemical Engineering
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