Contributions to the static dielectric constant of low-k xerogel films derived from ellipsometry and IR spectroscopy

✍ Scribed by C. Himcinschi; M. Friedrich; S. Frühauf; S.E. Schulz; T. Gessner; D.R.T. Zahn

• Book ID: 113936700
• Publisher: Elsevier Science
• Year: 2004
• Tongue: English
• Weight: 455 KB
• Volume: 455-456
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/j.tsf.2003.11.241