✦ LIBER ✦
Contribution to time-resolved enhanced chemical etching and simultaneous annealing of ion implantation amorphized silicon under intense laser irradiation
✍ Scribed by E. F. Krimmel; A. G. K. Lutsch; R. Swanepoel; J. Brink
- Publisher
- Springer
- Year
- 1985
- Tongue
- English
- Weight
- 871 KB
- Volume
- 38
- Category
- Article
- ISSN
- 1432-0630
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