✦ LIBER ✦
Contribution to range statistics of Boron implanted into Silicon at high energies : A. G. K. Lutsch, C. A. B. Ball, F. D. Auret and H. C. Snyman. Microelectron. J.12 (2) 25 (1981)
- Publisher
- Elsevier Science
- Year
- 1981
- Tongue
- English
- Weight
- 126 KB
- Volume
- 21
- Category
- Article
- ISSN
- 0026-2714
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