✦ LIBER ✦
Contribution of short lifetime radicals to the growth of particles in SiH4 high frequency discharges and the effects of particles on deposited films
✍ Scribed by Watanabe, Yukio
- Book ID
- 125490591
- Publisher
- AVS (American Vacuum Society)
- Year
- 1996
- Tongue
- English
- Weight
- 384 KB
- Volume
- 14
- Category
- Article
- ISSN
- 0734-2101
- DOI
- 10.1116/1.580069
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