✍ Scribed by L Ward
No coin nor oath required. For personal study only.
Contour graphs of 2 vs 4 for di erent ÿlm thicknesses and a range of angles of incidence have been plotted for the ellipsometric functions and in both the re ection and transmission modes. In the case of re ection ellipsometry, when the plots for R and R are superimposed, the two sets of contours cross nearly at right angles over a large part of the ÿeld, this being indicative of the high accuracy obtainable in using this technique to determine 4 and 2 and hence the optical constants, n and k, for the ÿlm material. The re ection ellipsometric technique is accurate over angles of incidence between 30
• and 75
• and for a range of ÿlm thicknesses between =30 and 5 . Transmission ellipsometry is less useful, due to anomalies in both Xs and Xp where sudden phase changes of ± occur in regions of interest. There is also the possibility of multiple solutions, although the use of a multiangle technique would enable the "correct" values to be more easily determined.
📜 SIMILAR VOLUMES