✦ LIBER ✦
Continuum modeling of post-implantation damage and the effective plus factor in crystalline silicon at room temperature
✍ Scribed by H.Y. Chan; M.P. Srinivasan; F. Benistant; K.R. Mok; Lap Chan; H.M. Jin
- Book ID
- 108289181
- Publisher
- Elsevier Science
- Year
- 2006
- Tongue
- English
- Weight
- 238 KB
- Volume
- 504
- Category
- Article
- ISSN
- 0040-6090
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