Continuum based modeling of silicon integrated circuit processing: An object oriented approach

✍ Scribed by Mark E. Law; Stephen M. Cea

• Book ID: 117627293
• Publisher: Elsevier Science
• Year: 1998
• Tongue: English
• Weight: 921 KB
• Volume: 12
• Category: Article
• ISSN: 0927-0256
• DOI: 10.1016/s0927-0256(98)00020-2