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Contamination effects in ion beam mixed cobalt silicide growth

✍ Scribed by SC Edwards; RA Collins; G Dearnaley

Publisher: Elsevier Science
Year: 1984
Tongue: English
Weight: 339 KB
Volume: 34
Category: Article
ISSN: 0042-207X
DOI: 10.1016/0042-207x(84)90190-8

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