✦ LIBER ✦

Contactless measurement of dopant distribution using etch roughnesses

✍ Scribed by G. Kloess; A. Cröll; K.W. Benz

No coin nor oath required. For personal study only.

📜 SIMILAR VOLUMES

Random errors distribution in contactles

✍ A. V. Kogan 📂 Article 📅 1973 🏛 Springer US 🌐 English ⚖ 182 KB

Contactless Measurement of Sheet Resista

✍ Saotome, H.; Oi, S.; Akimoto, S. 📂 Article 📅 2011 🏛 IEEE 🌐 English ⚖ 331 KB

Some Limitations of the Measurement of D

✍ Sieber, N. ;Wulf, H. E. 📂 Article 📅 1991 🏛 John Wiley and Sons 🌐 English ⚖ 370 KB

Contactless measurement of the spatial p

✍ P.F. Fontein; P. Hendriks; J.H. Wolter 📂 Article 📅 1990 🏛 Elsevier Science 🌐 English ⚖ 274 KB

Use of contactless vacuum thermal transd

✍ É. G. Baldin; Yu. V. Burov; V. K. Maskaev 📂 Article 📅 1971 🏛 Springer US 🌐 English ⚖ 191 KB

Direct measurement of dopant distributio

✍ Perea, Daniel E.; Hemesath, Eric R.; Schwalbach, Edwin J.; Lensch-Falk, Jessica 📂 Article 📅 2009 🏛 Nature Publishing Group 🌐 English ⚖ 496 KB