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Contactless interferometric incremental measurement technique

✍ Scribed by -Ing H.-J. Büchner; sc techn G. Jäger

Book ID: 103636980
Publisher: Elsevier Science
Year: 1988
Tongue: English
Weight: 417 KB
Volume: 6
Category: Article
ISSN: 0263-2241
DOI: 10.1016/0263-2241(88)90015-2

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