Contact resistivity of shallow junctions formed by implantation through Pt or PtSi

✍ Scribed by Bing-Yue Tsui; Mao-Chieh Chen

• Publisher: Elsevier Science
• Year: 1992
• Tongue: English
• Weight: 566 KB
• Volume: 35
• Category: Article
• ISSN: 0038-1101
• DOI: 10.1016/0038-1101(92)90152-3