Contact resistivity and dopant activation in pulsed-laser-annealed AuGe/GaAs contacts

✍ Scribed by O. Aina; W. Katz; K. Rose

• Publisher: Elsevier Science
• Year: 1983
• Tongue: English
• Weight: 309 KB
• Volume: 104
• Category: Article
• ISSN: 0040-6090
• DOI: 10.1016/0040-6090(83)90583-7