Contact resistivities of sputtered TiN and TiTiN metallizations on solar-cell-type-silicon

✍ Scribed by M. Mäenpää; M.-A. Nicolet; I. Suni; E.G. Colgan

• Book ID: 113204177
• Publisher: Elsevier Science
• Year: 1981
• Tongue: English
• Weight: 427 KB
• Volume: 27
• Category: Article
• ISSN: 0038-092X
• DOI: 10.1016/0038-092x(81)90060-8