Contact mechanics of a flexible imprinter for photocured nanoimprint lithography

✍ Scribed by G.M. McClelland; C.T. Rettner; M.W. Hart; K.R. Carter; M.I. Sanchez; M.E. Best; B.D. Terris

• Book ID: 106550864
• Publisher: Springer US
• Year: 2005
• Tongue: English
• Weight: 361 KB
• Volume: 19
• Category: Article
• ISSN: 1023-8883
• DOI: 10.1007/s11249-005-4265-6