✦ LIBER ✦
Contact-free exhaust system for vacuum compatible gas bearing guides
✍ Scribed by Nils Heidler; Christoph Schenk; Gerd Harnisch; Stefan Risse; Gerhard Schubert; Ramona Eberhardt; Andreas Tünnermann
- Book ID
- 113861472
- Publisher
- Elsevier Science
- Year
- 2012
- Tongue
- English
- Weight
- 922 KB
- Volume
- 36
- Category
- Article
- ISSN
- 0141-6359
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